Ebara backing pump unable to start after power outage - WKB97862

SYMPTOMS

• Unable to pump down instrument after power outage

• After pressing Pump, turbomolecular pumps start to speed up, but the Ebara pump seems stalled

• Error code can be seen on Ebara display (Err)

ENVIRONMENT

• Ebara

• Vion

• Xevo TQ-XS

• Xevo TQ-S

CAUSE

The Ebara pump is in an error state as a result of power outage.

FIX or WORKAROUND

1. Switch the Ebara pump off.
2. Wait for five minutes.
3. Switch the Ebara pump on. Check the display on the Ebara pump; you should see "n5500".

4. Pump down the instrument as usual.

ADDITIONAL INFORMATION

It is not necessary to reboot MS instrument electronics during an Ebara pump restart.