Ebara pump will not pump down after power outage; error "Uu1" - WKB95190
Article number: 95190
SYMPTOMS
- Instrument vented during unplanned power outage
- Error code "Uu1" shows on Ebara front panel, indicating an under voltage status
- Instrument and PC were restarted
- Full instrument communications are established
ENVIRONMENT
- Select Series Cyclic IMS QTof
- Xevo TQ-XS
- Ebara EV-SA30 pump
- Ebara EV-SA20 pump
CAUSE
Latched error code on Ebara pump
FIX or WORKAROUND
- Remove main power from Ebara pump for 10 minutes.
- Reattach main power.
- Pump instrument.
- Verify that instrument pumps properly.
ADDITIONAL INFORMATION
The EV-SA model has a built check valve inside the exhaust assembly.
This means gas does not flow back into the pump module via the exhaust side.
In event of pump stopping Uu1 alarm the valves close protecting pump from back streaming, meaning nothing will reach inlet or MS tool via the Ebara EV-SA pump.
The inlet will hold vacuum for a period when pump is stopped if the pumps Gas ballast is not open (in this case its closed) and foreline MS tool valve is closed and not passing.