No ETD fragmentation takes place - WKB26914
Article number: 26914
SYMPTOMS
- No ETD fragmentation
- Glow discharge signal is at expected intensity (mid-high e6)
ENVIRONMENT
- SYNAPT G2
- SYNAPT G2-S
- SYNAPT G2-Si
- SYNAPT XS
CAUSE
Trap TriWave cell is dirty.
FIX or WORKAROUND
- Clean or replace the trap cell.
ADDITIONAL INFORMATION
id26914, MALDIG2SI, SYNG2HD, SYNG2HDMAL, SYNG2MS, SYNG2MSMAL, SYNG2SHD, SYNG2SHDML, SYNG2SIHD, SYNG2SIMS, SYNG2SMS, SYNG2SMSML