No ETD fragmentation takes place - WKB26914
Article number: 26914
SYMPTOMS
- No ETD fragmentation
- Glow discharge signal is at expected intensity (mid-high e6)
ENVIRONMENT
- SYNAPT G2
- SYNAPT G2-S
- SYNAPT G2-Si
- SYNAPT XS
- ETD
CAUSE
Trap TriWave cell is dirty.
FIX or WORKAROUND
- Clean or replace the trap cell.
ADDITIONAL INFORMATION
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