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TQD does not achieve vacuum, turbo speed reaches only 20% - WKB112518

Article number: 112518

SYMPTOMS

  • Pumping system times out
  • Turbo pump achieves only 20% speed
  • When the source enclosure is open, you can hear a leak in source seals

ENVIRONMENT

  • TQ Detector
  • SQ Detector

CAUSE

Source O-ring leaking

FIX or WORKAROUND

  1. Take the source apart and refit or replace (as appropriate) O-rings on the PEEK ion block support.
  2. Re-assemble the source and start the vacuum system.
  3. Ensure that turbo speed reaches 100%.

ADDITIONAL INFORMATION

 

id112518, A-SQ, Q3100MSD, SQD, TQD, TQDIVD

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