TQD does not achieve vacuum, turbo speed reaches only 20% - WKB112518
Article number: 112518
SYMPTOMS
- Pumping system times out
- Turbo pump achieves only 20% speed
- When the source enclosure is open, you can hear a leak in source seals
ENVIRONMENT
- TQ Detector
- SQ Detector
CAUSE
Source O-ring leaking
FIX or WORKAROUND
- Take the source apart and refit or replace (as appropriate) O-rings on the PEEK ion block support.
- Re-assemble the source and start the vacuum system.
- Ensure that turbo speed reaches 100%.
ADDITIONAL INFORMATION
id112518, A-SQ, Q3100MSD, SQD, TQD, TQDIVD