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Ebara pump does not stay on during pump-down - WKB109018

Article number: 109018

SYMPTOMS

  • After venting of instrument, the Ebara starts to pump down but shuts down after 10-20 seconds
  • Error code OL2 or OL3 or similar on Ebara pump
  • Powering-off the pump resets the error, but it stops again on pump-down

ENVIRONMENT

  • SYNAPT G2-Si
  • SYNAPT G2-XS
  • Xevo TQ-XS

CAUSE

Pump is sensing high back pressure from the exhaust line going to the extraction.

FIX or WORKAROUND

  1. Power-off the Ebara pump to reset the error.
  2. Remove the exhaust line from the extraction outlet.
  3. Start the pump-down sequence from the Tune page.
  4. After 30 seconds, the exhaust line can be replaced into the wall outlet and the pump will continue to run.

ADDITIONAL INFORMATION

Investigation should be carried out to identify what is causing the initial back pressure in the lines (for example, inline flow controller or fan not running). 

id109018, MALDIG2SI, SYNG2SIHD, XEVOG2XSQT, XEVOTQS, XEVOTQSIVD, XEVOTQXS, XEVTQSMIVD, XEVTQXSIVD

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